Formation of Mg 2 Si 1-x Sn x thin films by co-sputtering using two different targets
The Japan Society of Applied Physics(2021)
关键词
thin films,mg,sn,co-sputtering
AI 理解论文
溯源树
样例
生成溯源树,研究论文发展脉络
Chat Paper
正在生成论文摘要
The Japan Society of Applied Physics(2021)