Silicon nitride ring resonator biosensors fabricated at AIM Photonics: detection of cytokines (Conference Presentation)

Ring resonators fabricated in silicon or silicon nitride constitute one of the most versatile and widely studied platform photonic technologies for biosensing. As part of an effort by AIM Photonics to advance the photonics manufacturing infrastructure of the United States, we have designed, fabricated, and tested a series of silicon nitride ring resonators for biosensing. Optimized designs will be incorporated into the AIM Photonics photonic design kit (PDK) and made available to the broader community. This talk will describe the evolution of our designs and their performance, with a particular focus on the detection of cytokines under microfluidic flow.