2836 Surface stress measurement of single crystal silicon microstructures using Raman spectroscopic uniaxial tensile testing

This paper describes an experimental analysis of surface stress distribution on single crystal silicon (SCS) microstructures using laser Raman spectroscope. A handmade tensile tester was employed to apply an uniaxial tensile stress to SCS specimen with a 270nm-height and 4μm-square SCS convex structure in the gauge section. In room temperature, Raman spectroscope measured surface stress, applied by the tensile tester, around the convex. The stress distribution obtained from two-curve fitting of Raman spectrum was in good agreement with that estimated by finite element analysis.