Visible Light Probing Sample Thinning Using Targeted Lapping

Visible Light (or Laser) Probing (VLP) is an exciting new development in Laser Voltage Probing (LVP) technology because it promises a dramatic improvement in resolution over current Near Infrared (NIR) solutions [1-3]. To have adequate visible light transmission for waveform probing and modulation mapping, however, ultrathinning of the silicon backside to <2-5 gm is required. The use of solid immersion lens (SIL) technology places additional requirements on sample preparation. In this paper, we present a simple, SIL compatible technique for VLP sample preparation.