Optical Properties Of High-Quality Oxide Coating Materials Used In Gravitational-Wave Advanced Detectors

Alex Amato, Silvana Terreni, Vincent Dolique, Daniele Forest,Gianluca Gemme,Massimo Granata, Lorenzo Mereni, Christophe Michel,Laurent Pinard, Benoit Sassolas, Julien Teillon, Gianpietro Cagnoli,Maurizio Canepa

JOURNAL OF PHYSICS-MATERIALS(2019)

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Abstract
High-reflection interference mirrors for current gravitational wave detectors (aLIGO, Advanced Virgo, KAGRA) are made of high-quality oxide multi-layers deposited by ion beam sputtering (IBS) at the Laboratoire des Materiaux Avances (LMA). For this task, LMA uses a large IBS custom-made machine (the grand coater GC) able to deposit very uniform coatings over very large surfaces, with diameter of some tens of cm. We report for the first time about the optical characterization by spectroscopic ellipsometry of oxide coatings deposited by the GC under strictly the same conditions used for the production of interference mirrors. We have investigated oxide materials like silica (SiO2), tantala (Ta2O5) and titania-doped tantala (Ti:Ta2O5), providing for each material a broad-band (190-1700 nm) accurate determination of the complex index of refraction, with particular attention to wavelengths used in interferometers. Particular focus has been dedicated to the influence of Ti-doping on tantala coating. The doping induces a red-shift of the optical gap and an increase of the NIR refractive index. Furthermore, doping induces a decrease of the so-called Urbach energy, consistent with the well-known reduction of the internal friction in these kind of systems.
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Key words
spectroscopic ellipsometry,amorphous solids,oxides,Urbach energy,gravitational waves,coatings
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