Various Tunable Photonic Crystal/Quasi-Photonic Crystal Structures Fabricated by Reconfigurable Interference System
ADVANCES IN NANODEVICES AND NANOFABRICATION(2012)
摘要
In this chapter, we demonstrate a reconfigurable interference lithography system (RILS) based on digital mirror device (DMD), which enables the fabrication of photonic crystals (PCs) or quasi-PCs structures with various structural lattices constant readily. The interference system is composed of a DMD chip, a concave lens and a convex lens. The interferential patterns are recorded in the polymer-dispersed liquid crystal (PDLC) materials, which can be electrically tuned and switched. We also propose another reconfigurable system combined with an axicon lens to achieve large effective area.
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