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Effect of oxygen concentration on minority carrier lifetime at the bottom of quasi-single crystalline silicon

Materials Science in Semiconductor Processing(2021)

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摘要
The formation mechanism of red zone in casting silicon ingots was investigated. Oxygen and metal distribution in ingots of crystalline Si were determined and analyzed. It was found that metal impurities is not the only factor to form bottom low minority carrier lifetime region. Interstitial oxygen with relative high concentration also decreases carrier lifetime at ingot bottom.
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关键词
Casting silicon,Minority carrier lifetime,Oxygen concentration,Red zone
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