Raman spectra of DLC films prepared by bipolar-type plasma based ion implantation
TRANSACTIONS OF THE MATERIALS RESEARCH SOCIETY OF JAPAN(2006)
摘要
Examination of Raman spectroscopy on the microstructure of diamond like carbon (DLC) films prepared by the bipolar-type plasma based ion implantation as a function of positively and negatively pulsed voltages (V-p and V-n) were carried out. Raman spectra were fitted by 4 peaks (D1: 1190 cm(-1), D2: 1380 cm(-1), G1: around 1530 - 1555 cm(-1) and G2: 1590 cm(-1)). The G1 peak shifted to higher wavenumbers and the intensity of G2 peak was increased with increasing V-p. In addition, the intensity ratio of D (D1 + D2) to G (G1 + G2) peaks was also increased. These results suggested that graphite structure was formed as V-p increased. With increasing V-n, on the other hand, the G1 peak did not shift so much and the intensity of G2 peak was decreased. This corresponds to the development of the turbostratic form (t-DLC).
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关键词
Raman spectra,bipolar plasma,PBII,DLC,turbostratic form
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