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Optical Properties Of Vo2 Nano Periodic Array

JOURNAL OF INFRARED AND MILLIMETER WAVES(2016)

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Abstract
The optical properties of VO2 nano periodic array were studied in order to obtain low phase transition temperature and high quality optical material widely used in the field of intelligent window. Optical properties of VO2 nano periodic array at different filling ratios were calculated with finite difference time domain method, and the best VO2 nano periodic array was selected. Vanadium film was deposited on the glass substrate by magnetic DC sputtering, then VO2 film was formed by annealing under air condition, and VO2 nano periodic array was gained by photolithography and etching technology. Its microstructure and optical properties were tested by SEM, XRD and XPS as well as spectrophotometer. The results show that the phase transition temperature of VO2 nano periodic array with filling ratio 0.74 decrease about 25 degrees C and the transmittance has changed 39% between the metallic and semiconducting states at 1700 nm. VO2 nano periodic array exhibits the better optical properties than VO2 film before and after phase transition. It is indicated that the optical properties can be improved through regulating the structure of VO2 nano periodic array.
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Key words
VO2,nano periodic array,optical property,thermochromism
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