InGaAs Focal Plane Array with the Sub-10 Mu M Pixel Pitch and 2.6 Mu M Cut-off Wavelength

A sub-10 mu m InGaAs (IGA) focal plane array (FPA), with cut-off wavelength of 2.6 mu m has been developed. The pixel pitch is reduced significantly comparing with that of reported extended wavelength IGA FPAs. To verify the feasibility of technology, the performance of sub-10 mu m IGA FPA was tested and compared with 30 mu m pixel pitch IGA FPA, which was fabricated from the same epitaxial material. The sub-10 mu m IGA FPA exhibits high performances in terms of dark current (0.45 nA @ V-R = 10 mV) and R(0)A (14.7 Omega . cm(2)) at room temperature. Its quantum efficiency can reach 63%. The comparable performances to 30 mu m pixel pitch IGA FPA illustrate that the sub-10 mu m IGA FPA fulfils the needs of large formats (>1 K x 1 K) and high densities in extended wavelength IGA detectors.