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Investigation on Preparation of Vanadium Nitride Hard Coating by In-Situ Method Technique

Materials letters(2020)

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摘要
Tool performance directly affects cutting efficiency, processing cost and other issues. It is of great practical significance to develop new coated tools with excellent performance. The vanadium nitride coatings were prepared on surface of T12 steel by chemical vapor deposition in-situ reactive deposition. The result shows that high purity vanadium nitride coatings with thickness over 20 mu m and average grain size of 34.36 nm can be prepared by suitable deposition process.
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关键词
Chemical vapor deposition,Coatings,Surfaces,Orthogonal test,Deposition rate
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