Piezoelectric Actuator for High Resolution Linear Displacement Systems

This work presents a piezoelectric actuator which is designed to improve resolution for micrometer screws or motorized actuators such as actuators with stepper motors. Several modifications of piezoelectric actuator were implemented for closed-loop and open-loop applications. For closed-loop applications strain gages are used to obtain a feedback signal. As a result a resolution of displacement measurement up to 18 nm is achieved.