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Spatial Control of the Self-assembled Block Copolymer Domain Orientation and Alignment on Photopatterned Surfaces

ACS applied materials & interfaces(2020)

引用 9|浏览92
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关键词
photopatterning,block copolymers,directed self-assembly,lithography,photoacid diffusion,thin films,infrared spectroscopy,NEXAFS spectroscopy
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