Uncertainty of Measuring Shape Deviations in Planar Surfaces by the Reference Plane Method

We consider problems estimating measurement uncertainty for shape deviations in planar surfaces of large parts using the reference plane method. The sources of uncertainty in the implementation of various measurement schemes by this method are analyzed. The schemes are determined by the methods of realization of the output base – the plane defined by the three reference points of the supporting platform of the measuring system, as well as the methods of obtaining and processing primary measurement information. The results of experimental studies of the accuracy of a multisensor system designed to assess the topography of the flat surfaces of mechanical elements of particle accelerators are presented.