Quantification Of Atomic Hydrogen Anion Density In A Permanent Magnet Based Helicon Ion Source (Helen) By Using Pulsed Ring Down Spectroscopy
REVIEW OF SCIENTIFIC INSTRUMENTS(2019)
摘要
In the present work, a permanent magnet-based helicon plasma source (HELEN) is characterized as a negative ion source. A noninvasive diagnostic technique based on cavity ring down spectroscopy (CRDS) is developed to measure the line-integrated negative hydrogen ion (H-) density in HELEN. This paper discusses the experimental results in which negative hydrogen ion density is measured for different magnetic field, pressure, and RF (13.56 MHz) power configurations. It is observed that in high power range (800-850 W), the source is operating in helicon wave heating mode with a background plasma density of similar to 10(18) m(-3) and electron temperature of similar to 2 eV. Negative hydrogen ion density is measured by CRDS method and also by optical emission spectroscopic technique. The measured negative ion density is in the range of similar to 10(16) m(-3) under volume mode operational condition even without any use of standard magnetic filter or cesium seeding in the downstream region. The influence of pressure variation (pressure range from 4 x 10(-3) mbar to 4 x 10(-2) mbar) on negative ion density production is not significant, except for a particular axial magnetic field configuration (55 G) and at 8 x 10(-3) mbar pressure, where similar to 34% hike is observed. Published under license by AIP Publishing
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关键词
atomic hydrogen anion density,helicon quantification source,spectroscopy,permanent magnet
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