Microstructure of BaTiO₃ and SrTiO₃ layers obtained by injection MOCVD

BaTiO3 (BTO) and SrTiO3 (STO) layers were deposited by injection MOCVD using both a mixed Ba2Ti2 precursor (dissolved in hexane) and a Sr(thd)(2), Ba(thd)(2) and Ti(OPri)(2)(thd)(2) precursor system (dissolved in monoglyme). Films have been deposited at different temperatures between 600 degrees C and 850 degrees C. The microstructural properties of the films obtained on different kinds of substrates MgO (100), LaAlO3 (012), sapphire (1 - 102), Si (100), Pt on Si and YBa2Cu3O7 (YBCO) on LaAlO3 are compared.