Microstructure of BaTiO3 and SrTiO3 layers obtained by injection MOCVD
JOURNAL DE PHYSIQUE IV(1998)
Abstract
BaTiO3 (BTO) and SrTiO3 (STO) layers were deposited by injection MOCVD using both a mixed Ba2Ti2 precursor (dissolved in hexane) and a Sr(thd)(2), Ba(thd)(2) and Ti(OPri)(2)(thd)(2) precursor system (dissolved in monoglyme). Films have been deposited at different temperatures between 600 degrees C and 850 degrees C. The microstructural properties of the films obtained on different kinds of substrates MgO (100), LaAlO3 (012), sapphire (1 - 102), Si (100), Pt on Si and YBa2Cu3O7 (YBCO) on LaAlO3 are compared.
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Key words
batio3,injection mocvd,microstructure
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