Liquid cell with temperature control for in situ TEM chemical studies
MEASUREMENT SCIENCE AND TECHNOLOGY(2019)
摘要
Liquid cells are hermetically sealed capsules that make it possible to image through liquids at the nanoscale using transmission electron microscopes (TEM). Until recently liquid cells can be passive vessels or integrate electrodes for electrodeposition experiments. Temperature is a key parameter for the chemical kinetics of certain processes. This paper describes a temperature controlled liquid cell for in situ TEM studies. The liquid cell integrates a resistive element for both heating and sensing temperature. A capacitively coupled heat feedback technique is implemented to control the temperature of the liquid cell from room temperature to 100 degrees C with an accuracy of +/- 0.1 degrees C. In situ TEM experiments illustrate the heating capability of such temperature controlled liquid cells observed at the nanoscale.
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关键词
liquid cell,TEM,temperature control,capacitively coupled heat feedback,microsystem
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