Er2O3薄膜的应用及制备方法研究进展
Metallic Functional Materials（2011）
Abstract
作为稀土氧化物的一种,氧化铒具有优良的光学和电学性能,具有广阔的技术应用前景.本文综述了Er2O3薄膜的各种应用,描述了Er2O3薄膜的各种制备方法及研究现状,并对各种制备方法的优缺点进行了评述,最后对Er2O3薄膜的应用和制备方法作了总结.
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Key words
application,preparation technology,thin films,erbium oxide,researching development
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