High- ${Q}$ Butterfly-Shaped AlN Lamb Wave Resonators
IEEE Electron Device Letters(2017)
摘要
Butterfly-shaped aluminum nitride (AlN) plates with anchor-to-plate angle smaller than 90° are proposed to boost the quality factor (Q) of Lamb wave resonators (LWRs) thanks to the elimination of the anchor loss. Finite-element method simulation shows that the butterfly-shaped plate can efficiently reduce mechanical energy leakage via the supporting anchors and accordingly enhance the mechanical Q...
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关键词
Aluminum nitride,III-V semiconductor materials,Resonators,Finite element analysis,Mechanical energy,Vibrations,Q-factor
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