Study of Oxygen Concentration in TMAH Solution for Improvement of Sigma-Shaped Wet Etching Process
Solid State Phenomena（2016）
Abstract
Tetramethylammonium hydroxide (TMAH) is a common etchant for Sigma shape formation in IC manufacturing. The impact of oxygen dissolved in TMAH solution on process was studied in this paper. A novel O2 gas injector was developed to improve the process stabilization by control of the oxygen concentration in TMAH solution
MoreTranslated text
Key words
TMAH,sigma wet etching,oxygen
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined