Titanium Nitride as a Strain Gauge Material

Nis Dam Madsen, Mathias Hausladen,Serguei Chiriaev, Peter Johannesen,Zacarias Eduardo Fabrim,P.F.P. Fichtner,Jakob Kjelstrup-Hansen

Journal of Microelectromechanical Systems（2016）

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摘要

The performance of titanium nitride (Ti-N) thin films deposited by reactive magnetron sputtering for use as a strain gauge material was investigated. Films of different composition ranging from pure titanium to over-stoichiometric Ti-N were prepared by varying the nitrogen flow to total flow ratio (α). The atomic composition was measured using Rutherford backscattering spectrometry and energy-disp...

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关键词

Strain,Nitrogen,Electrical resistance measurement,Conductivity,Titanium,Thermal stability,Temperature

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