Enhanced In-Plane Anisotropy and Ferromagnetic Resonance Frequency in Permalloy Films Laminated With Nitrogen-Doped Tantalum

Soft magnetic materials are used in integrated power magnetic devices (such as micro-inductors and microtransformers) to achieve reasonable inductances at frequencies over a few megahertz. However, the out-of-plane (perpendicular) anisotropy, in thick films produced by vapor deposition, worsens the in-plane soft magnetic properties. This paper reports on the nano-lamination of Permalloy (Ni81Fe19)...