Apparatus for Generating Quasi-Free-space Microwave-Driven Plasmas.

An apparatus for generating quasi-free-space microwave-driven plasmas has been designed, constructed, and tested. The plasma is driven by a multi-kW, ∼5 GHz microwave beam focused at the center of a vacuum chamber using a Koch-type metal plate lens. Sustained plasma discharges have been generated in argon at pressures ranging from 150 to 200 mTorr, at beam power levels ranging from 5 to 10 kW, and at gas flow rates of approximately 200 SCCM.