Electrode Optimization of 100MHz High-Frequency Quartz Resonator Based on Equivalent Mass Method
Japanese Journal of Applied Physics(2013)
摘要
Electrode optimization based on the equivalent mass method was carried out for a 100 MHz high-frequency fundamental thickness-shear AT-cut (quartz cut with a cutting angle of about 35.25 degrees to the optic axis of the crystal) quartz resonator. Firstly, the electrode dimensions were optimized through three-dimensional finite-element modeling by the equivalent mass method. Secondly, on the basis of simulation results, 100 MHz fundamental frequency resonators were fabricated and quality factors were measured. The experimental and calculated results are highly consistent with the simulation results. The equivalent mass method combined with the finite-element method is confirmed to be applicable in the development of high-frequency quartz resonators. (C) 2013 The Japan Society of Applied Physics
更多查看译文
关键词
electrode optimization,quartz,equivalent mass method,high-frequency
AI 理解论文
溯源树
样例
![](https://originalfileserver.aminer.cn/sys/aminer/pubs/mrt_preview.jpeg)
生成溯源树,研究论文发展脉络
Chat Paper
正在生成论文摘要