Effects of Rapid Thermal Annealing on Electrical Transport in Heavily Doped ZnO Thin Films Deposited at Different Substrate Temperatures

In this work, heavily doped ZnO thin films with carrier concentrations of 1.7 × 10 20 –1.1 × 10 21 cm −3 were prepared on glass substrates using direct current magnetron sputtering combined with rapid thermal annealing (RTA). The effects of RTA on the electrical transport properties of the thin films were investigated. Results showed that the resistivities of the thin films deposited at low temperatures were markedly improved due to the increased mobilities and/or carrier concentrations. Temperature-dependent Hall measurements and theoretical calculations suggested that the influence of grain boundary scattering was negligible for all the samples and the mobility was mainly determined by ionized impurity scattering. The influence of crystallographic defects on the mobility could be effectively reduced via RTA when the carrier concentration was above 4.0 × 10 20 cm −3 , resulting in a mobility and resistivity close to the ionized impurity scattering theoretical estimation. The highest mobility of 46 cm 2 V −1 s −1 at the resistivity of 2.8 × 10 −4 Ω cm and the lowest resistivity of 2.6 × 10 −4 Ω cm were achieved for the RTA-treated 1 wt.% Al-doped ZnO and 5 wt.% Ga-doped ZnO thin films, respectively.