Niobium films produced by magnetron sputtering using an Ar-He mixture as discharge gas G M Schucan,Cristoforo Benvenuti,Sergio Calatronimag(1995)引用 25|浏览5暂无评分关键词grain size,copper,magnetron sputteringAI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要