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High-performance blazed GxLTM device for large-area laser projector

PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS (SPIE)(2006)

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摘要
A blazed GxL device is described that has high optical efficiency (> 70% for RGB lasers), and high contrast ratio (> 10,000:1), and that is highly reliable when used in a large-area laser projection system. The key features were a robust design and precise stress control technology to maintain a uniform shape (bow and tilt) of more than 6,000 ribbons, a 0.25-mu m CMOS compatible fabrication processing and planarization techniques to reduce fluctuation of the ribbons, and a reliable Al-Cu reflective film that provided protection against a high-power laser. No degradation in characteristics of the GxL device was observed after operating a 5,000- lumen projector for 2,000 hours and conducting 2,000 temperature cycling tests at -20 degrees C and +80 degrees C. Consequently, the world's largest laser projection screen with a size of 2005 inches (10 m x 50 m) and 6 million pixels (1,080 x 5,760) was demonstrated at the 2005 World Exposition in Aichi, Japan.
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关键词
GLV,GxL,blaze,MEMS,laser projector
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