Chrome Extension
WeChat Mini Program
Use on ChatGLM
VIPCreated with Sketch.

Self-Aligned Contacts For 10nm Fdsoi Node: From Device To Circuit Evaluation

H. Niebojewski, C. Le Royer,Y. Morand,O. Rozeau,M. -A. Jaud,S. Barnola,C. Arvet,J. Pradelles,J. Bustos,J. M. Pedini,E. Dubois,O. Faynot

2013 IEEE SOI-3D-SUBTHRESHOLD MICROELECTRONICS TECHNOLOGY UNIFIED CONFERENCE (S3S)（2013）

Cited 0|Views45
No score
Key words
capacitance,electrical contacts,silicon on insulator
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined