Integrated Nanoscale Porous Silicon Waveguide for Molecular Sensing Applications

Frontiers in Optics（2012）

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摘要

A grating-coupled nanoscale porous silicon waveguide sensor with an integrated microfluidic flow cell is demonstrated for the selective detection of nucleic acid molecules. Diffusion, adsorption, and desorption coefficients of several biomolecules are also presented.

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关键词

Nanophotonic Waveguides,Nanosensors,Porous Silicon,Microcavities,Integrated Circuits

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