MEMS-4-MMIC: Innovative RF-MEMS MMIC components for agile RF-frontends

RF Micro-Electro-Mechanical-System switches (MEMS) have experienced a tremendous progress during the last decade in terms of technology development and RF-applications. Integrating RF-MEMS switches and MMIC (Monolithic Microwave Integrated Circuits) is considered the next logical and economical step in MMIC development. The project MEMS-4-MMIC aims at the physical merging of two different concepts: innovative RF-M EMS switches on one side and proven MMIC technology on the other side thus creating highly integrated multifunctional building blocks for high-value applications such as reconfigurable telecommunication systems, phased arrays for mobile satellite platforms and radar. Within the project, the RF-MEMS MMIC designs will target ohmic switches at frequencies up to approximately 40 GHz.