Patterning of nanodiamond tracks and nanocrystalline diamond films using a micropipette for additive direct-write processing.
ACS applied materials & interfaces(2015)
摘要
The ability to pattern the seeding of nanodiamonds (NDs), and thus selectively control areas of diamond growth, is a useful capability for many applications, including photonics, microelectromechanical systems (MEMS) prototyping, and biomaterial design. A microprinting technique using a computer-driven micropipette has been developed to deposit patterns of ND monolayers from an unreactive water/glycerol ND ink to 5-μm resolution. The concentration and composition of the ND solution were optimized to realize high-density monolayers of NDs and consistent ND printing. Subsequent nanocrystalline diamond (NCD) patterns grown using chemical vapor deposition showed a high level of compliance with the printed ND pattern. This "direct-write", bottom-up, and additive process offers a versatile and simple alternative to pattern diamond. The process has the particular advantage that it does not require lithography or destructive processing such as reactive-ion etching (RIE) and, pertinently, does not involve reactive chemicals that could alter the surface chemistry of NDs. Furthermore, given that this process obviates the use of conventional lithography, substrates that are not suitable for lithographic processing (e.g., excessively small or three-dimensional structured substrates) can be inscribed with ND patterns. The technique also allows for the growth of discrete, localized, single-crystal nanodiamonds with applications in quantum technology.
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关键词
diamond,direct-write,microwave plasma-enhanced CVD,nanodiamond,patterning
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