How to monitor Metal-Insulator-Metal (MIM) capacitors dielectric reliability

Veronica Martinez,C Besset,F Monsieur,D Ney,Laurent Montes,Gerard Ghibaudo

Nis（2008）

引用 2|浏览7

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摘要

In this paper, a new method to monitor MIM capacitors dielectric reliability has been developed in order to avoid misinterpretation due to self-heating, fringe effects and dielectric thickness spread. Original test structures have been designed with the aim of emphasize, model and thus correct these effects.

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关键词

mim devices,capacitors,reliability,mim capacitors,dielectric reliability,dielectric thickness spread,effects,metal-insulator-metal capacitors,self-heating,dielectrics

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