Study On Optical Confocal Probe Based On Time Difference Measurement With No Reference Path

On the basis of the measuring principle of dynamic active optical confocal probe based on time difference measurement that has a reference path, a dynamic active optical confocal probe based on time difference measurement without reference path is developed. In this paper, the working principle of this optical confocal probe is dissertated. A large-scale integrated measuring system is designed to simplify the structure of the probe and to enhance the stability of the probe. At the end of the paper, experiments about the performance test of the optical confocal probe based on time difference measurement with no reference path is carried out. Experiment results show that the probe has a measuring resolution of 0.1 mu m, a measuring range of 0.2mm and a linearity of 0.4 mu m.