Colority and technological parameters in preparation of ZrN thin films

ZrN thin films were prepared and regressive models were developed on the basis of experiment through rotational quadratic orthogonal design for the colority and three parameters,ie.,nitrogen concentration,target power and the time required for film deposition.The effects of the three parameters on the film colority were discussed.An optimum combination scheme was therefore found involving technological parameters in the coordinate planes of different colority objectives by way of finding optimum solution of the models.