Room-Temperature Preparation of High-Transparency Low-Resistivity ITO Films by Ion Beam Sputtering
Journal of Electronic Materials(2010)
摘要
Low-temperature preparation of transparent conducting electrodes is essential for flexible optoelectronic devices. Tin-doped In 2 O 3 films with high transparency and low electrical resistance were prepared at room temperature using a radiofrequency ion beam sputtering system. Specimens with a low sheet resistivity of 10 −4 Ω cm and a high visible-light transmittance of 85% to 90% were obtained. Hall measurements were used to determine mobility and carrier concentration, and the effects on resistivity are discussed.
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关键词
Tin-doped In2O3 (ITO),transparency,resistivity,ion beam sputtering (IBS)
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