Scanning-spatial-phase alignment for zone-plate-array lithography

Rajesh Menon,Euclid E. Moon,Mark K. Mondol,Fernando J. Castaño,Henry I. Smith

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B（2004）

引用 21|浏览7

暂无评分

摘要

In this article, we describe a technique for level-to-level alignment in zone-plate-array lithography, that does not require an external microscope, yet provides overlay superior. to conventional microscopes. (C) 2004 American Vacuum Society.

查看译文

关键词

scanning-spatial-phase,zone-plate-array

AI 理解论文

溯源树

样例

生成溯源树，研究论文发展脉络

Chat Paper

正在生成论文摘要