Piezo-Actuated Higher Order Wavefront Correction Lens

2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)(2023)

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摘要
We present an adaptive lens for higher order aspherical aberration correction based on a segmented piezo-glass-piezo active membrane. With a suitable application of voltages to the segmented electrodes, we can correct all aberrations of 2 nd and 3 rd order (defocus, astigmatism, coma and trefoil) and the spherical aberration by up to 5 μm (defocus of up to 45 μm, or 6 dpt). The lens comes with a large aperture of 12 mm at an outer diameter of 18 mm and a thickness of 2 mm.
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关键词
Adaptive lens,Wavefront correction,Piezoelectric lens,Aberration correction
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