Minimizing Kinetic Inductance in Tantalum-Based Superconducting Coplanar Waveguide Resonators for Alleviating Frequency Fluctuation Issues
arxiv(2024)
摘要
Advancements in the fabrication of superconducting quantum devices have
highlighted tantalum as a promising material, owing to its low surface
oxidation microwave loss at low temperatures. However, tantalum films exhibit
significantly larger kinetic inductances compared to materials such as aluminum
or niobium. Given the inevitable variations in film thickness, this increased
kinetic inductance leads to considerable, uncontrolled frequency variances and
shifts in components like superconducting coplanar waveguide (SCPW) resonators.
Achieving high precision in resonator frequencies is crucial, particularly when
multiple resonators share a common Purcell filter with limited bandwidth in
superconducting quantum information processors. Here, we tackle this challenge
from both fabrication and design perspectives, achieving a reduction in
resonator frequency fluctuation by a factor of more than 100. Concurrently, the
internal quality factor of the SCPW resonator remains at high level. Our
findings open up new avenues for the enhanced utilization of tantalum in
large-scale superconducting chips.
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