Broadband Optomechanical Accelerometer Reaching the Thermomechanical Limit Based on Suspended Si3N4 Membrane ResonatorWei Li,Wenyao Liu,Chenxi Liu, Yanxia Gu,Lai Liu,Yanru Zhou,Enbo Xing,Yunbo Shi,Jun Tang,Jun LiuIEEE Sensors Journal(2024)引用 0|浏览6暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要