Biaxial Piezoelectrically Driven MEMS Mirror with Large Design FlexibilityLena Wysocki, Patrick Schütt,Jörg Albers, Gunnar Wille, Erdem Yarar, Paul Raschdorf, Lianzhi Wen,Shanshan Gu-StoppelEurosensors 2023(2024)引用 0|浏览2暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要