Chemically Tailored Growth of 2D Semiconductors via Hybrid Metal-Organic Chemical Vapor Deposition
arxiv(2024)
摘要
Two-dimensional (2D) semiconducting transition-metal dichalcogenides (TMDCs)
are an exciting platform for new excitonic physics and next-generation
electronics, creating a strong demand to understand their growth, doping, and
heterostructures. Despite significant progress in solid-source (SS-) and
metal-organic chemical vapor deposition (MOCVD), further optimization is
necessary to grow highly crystalline 2D TMDCs with controlled doping. Here, we
report a hybrid MOCVD growth method that combines liquid-phase metal precursor
deposition and vapor-phase organo-chalcogen delivery to leverage the advantages
of both MOCVD and SS-CVD. Using our hybrid approach, we demonstrate WS_2
growth with tunable morphologies - from separated single-crystal domains to
continuous monolayer films - on a variety of substrates, including sapphire,
SiO_2, and Au. These WS_2 films exhibit narrow neutral exciton
photoluminescence linewidths down to 33 meV and room-temperature mobility up to
34 - 36 cm^2V^-^1s^-^1). Through simple modifications to the liquid
precursor composition, we demonstrate the growth of V-doped WS_2,
MoxW_1_-_xS_2 alloys, and in-plane WS_2-MoS_2 heterostructures.
This work presents an efficient approach for addressing a variety of TMDC
synthesis needs on a laboratory scale.
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