Vacuum Ultraviolet Light-Generating Metalens

Ming Lun Tseng,Michael Semmlinger,Ming Zhang,Catherine Arndt,Tzu-Ting Huang,Jian Yang,Hsin Yu Kuo,Vin-Cent Su,Mu Ku Chen,Cheng Hung Chu,Benjamin Cerjan,Din Ping Tsai, Peter Nordlander,Naomi J. Halas

2022 Conference on Lasers and Electro-Optics Pacific Rim (CLEO-PR)（2022）

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摘要

Vacuum ultraviolet (VUV) light is of great importance to many applications such as photochemistry and nanolithography. In this talk, a nonlinear metalens composed of ZnO nanoantennas for VUV generation and focusing will be reported.

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关键词

Vacuum Ultraviolet,Nanofabrication,Nonlinear Optical,Metasurface

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