Sensing with extended gate negative capacitance ferroelectric field-effect transistors

Chip(2023)

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摘要
With major signal analysis elements situated away from the measuring environment, extended gate (EG) ion-sensitive field effect transistors (ISFETs) offer prospects for whole chip circuit design and system integration of chemical sensors. This work presents the formulation of a highly sensitive and power-efficient ISFET based on a metal-ferroelectric-insulator gate stack with negative capacitance (NC)-induced super-steep subthreshold swing and ferroelectric memory function. Along with a remotely connected extended gate electrode, the architecture facilitates diverse sensing functions for future establishment of smart biochemical sensor platforms.
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关键词
Extended gate,Ion-sensitive field-effect transistors,Negative capacitance,Sub-60 mV/dec subthreshold swing,Ferroelectric memory effect
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