Epitaxial SiGe/Si Multi-Stacks for CFET Devices

Roger Loo,Yosuke Shimura, Anjani Akula,Clement Porret, Alex Merkulov, Mustafa Ayyad,Han Han,Olivier Richard, Andrea Impagnatiello,Andriy Hikavyy

Extended Abstracts of the 2023 International Conference on Solid State Devices and Materials(2023)

引用 0|浏览3
暂无评分
AI 理解论文
溯源树
样例
生成溯源树,研究论文发展脉络
Chat Paper
正在生成论文摘要