Research on Precision Positioning Method of Macro-micro Composite motion platform

Macro-micro composite motion platform is one of the main motion modes in high speed and large stroke precision motion platform, which has gradually become one of the important advanced technologies to realize high precision positioning. In this paper, a double feedback structure control method is proposed to dynamically compensate for the positioning error of the driving micro-platform. Firstly, the principle of the dynamic compensation method is introduced. Secondly, the calculation formula and design scheme of dynamic compensation is proposed. Finally, the feasibility of the proposed method is verified by simulation experiments.