EURAMET supplementary comparison EURAMET.L-S26.1, measurement of groove depth standards in the range 5 μm up to 0.9 mm

Antti Lassila, V Byman, J Kirchhoff, M Aksulu, M Ozaita, L Carcedo

Metrologia(2023)

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摘要
Main text In this supplementary comparison depths of six v-shaped grooves with nominal values 5/20/50/200/600 and 900 μm were measured. The depths were measured according to ISO 5436-1. The PTB nickel depth setting standard was used as reference standard. PTB and MIKES measures all depths, CEM 2 and UME 3 larger depths. The results with associated uncertainties were in agreement. To reach the main text of this paper, click on Final Report . Note that this text is that which appears in Appendix B of the BIPM key comparison database https://www.bipm.org/kcdb/ . The final report has been peer-reviewed and approved for publication by the CCL, according to the provisions of the CIPM Mutual Recognition Arrangement (CIPM MRA).
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groove depth standards
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