Room temperature fabrication of highly proton conductive amorphous zirconia-based thin films achieved through precise nanostructure control

Makoto Takayanagi,Takashi Tsuchiya,Daiki Nishioka,Tohru Higuchi,Kazuya Terabe

Journal of Materials Chemistry C（2023）

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摘要

YSZ thin films with controlled microstructure were fabricated without annealing process. The microstructure strongly depended on the oxygen partial pressure during the deposition, and the proton conductivity also varied significantly.

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关键词

thin films,precise nanostructure control,proton conductive,zirconia-based

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