Electrical switching of Ge2Sb2Te5 memory cells based on silicon photonic waveguide microheaters

Wen Zhou,Xuan Li,Nathan Youngblood,Wolfram H. P. Pernice,C. David Wright,Harish Bhaskaran

2022 Conference on Lasers and Electro-Optics (CLEO)（2022）

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摘要

We demonstrate binary and multilevel electrical programming of the phase change material Ge 2 Sb 2 Te 5 (GST) memory cells based on ion-implanted silicon-on-insulator (SOI) waveguide microheaters. GST cells can be reversibly switched by using low-amplitude electric pulses.

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关键词

ion-implanted silicon-on-insulator waveguide microheaters,GST cells,low-amplitude electric pulses,electrical switching,silicon photonic waveguide microheaters,binary programming,multilevel electrical programming,phase change material Ge2Sb2Te5 memory cells

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