Fully Tunable Fabry-Pérot Cavity on Silicon Photonic MEMS with 10 nW Static Power Consumption

Young J. Park, Man J. Her,Dong U. Kim,Dong J. Choi,Min G. Lim,Myung S. Hong,Sangyoon Han

2023 Conference on Lasers and Electro-Optics (CLEO)（2023）

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摘要

We report on a fully tunable Fabry-Pérot cavity on the silicon photonic MEMS having only 10nW static power. Its resonance wavelength is tunable over the full FSR, and its transmissivity is tunable up to 3.8dB.

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关键词

10 nW static power consumption,10nW static power,fully tunable Fabry-Pérot cavity,noise figure 3.8 dB,power 10.0 nW,silicon photonic MEMS

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