Thin-Film Lithium Niobate Electro-Optic Modulators with Integrated Silicon Photonic Thermo-Optic Phase Shifters

Nicholas A. Boynton,Thomas A. Friedmann,Shawn C. Arterburn,Katherine M. Musick, Matthew S. Boady,Andrew L. Starbuck,Douglas C. Trotter,Andrew S. Pomerene,Ashok Kodigala,Anthony L. Lentine,Paul A. Morton,Michael R. Gehl

2023 Conference on Lasers and Electro-Optics (CLEO)（2023）

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摘要

TFLN/silicon photonic modulators featuring active silicon photonic components are reported with a V π of 3.6 Vcm. This hybrid architecture utilizes the bottom of the buried oxide as the bonding surface which features minimum topology.

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关键词

active silicon photonic components,integrated silicon photonic thermo-optic phase shifters,thin-film lithium niobate electro-optic modulators

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